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/usr/share/qflow/tech/osu050/osu050.prm is in qflow-tech-osu050 1.1.58-1.

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The actual contents of the file can be viewed below.

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;
; configuration file for osu050 (0.50um process)
; Note that these values are totally bogus!
;

lambda  0.01    ; length scaling, microns (1 lambda = 1 centimicron)

capga   .0115 ; gate capacitance, pF/micron^2

capda 0.0012
capdp 0.0013
cappda 0.00260
cappdp 0.00090

lowthresh  0.5  ; logic low threshold as a normalized voltage
highthresh 0.5  ; logic high threshold as a normalized voltage

cntpullup 0     ; irrelevant, cmos technology; no depletion transistors
diffperim 0     ; don't include diffusion perimeters for sidewall cap.
subparea 0      ; poly over transistor won't count as part pf bulk-poly cap.
diffext  0      ; diffusion extension for each transistor

resistance n-channel static   3   0.6   3858.26
resistance p-channel static   8.7   0.6   2874.04
resistance n-channel dynamic-high   3   0.6   7794.00
resistance p-channel dynamic-low   8.7   0.6   6568.70